Operation process of vacuum hot pressing furnace shutdown

1. After the high vacuum is not used according to the user’s process, first close the main baffle valve, stop the diffusion pump heating, and close the lower butterfly valve after the diffusion pump cools to room temperature. (The lower butterfly valve can be closed after about 60 minutes)

2. After the heating is stopped, when the temperature drops below 200℃, the valve connected to the furnace body (upper butterfly valve, lower butterfly valve, main flap valve) can be closed. After the diffusion pump has stopped, stop the mechanical pump.

3. When the temperature of the furnace and the diffusion pump have dropped to a safe position, the hydraulic part is also in a stopped state, and the cooling water can be stopped.

4. After all mechanical parts are stopped, stop the air source, power source and water source.