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Polyimide film related components and semiconductor applications

Polyimide film related components and semiconductor applications

1. Photoresist: Some polyimides can also be used as photoresists. There are negative glue and positive glue, and the resolution can reach sub-micron level. It can be used in color filter film when combined with pigments or dyes, which can greatly simplify the processing procedures.

2. Application in microelectronic devices: as a dielectric layer for interlayer insulation, as a buffer layer, it can reduce stress and improve yield. As a protective layer, it can reduce the impact of the environment on the device, and it can also shield the a-particles, reducing or eliminating the soft error of the device. The semiconductor industry uses polyimide as a high-temperature adhesive. In the production of digital semiconductor materials and MEMS system chips, the polyimide layer has good mechanical ductility and tensile strength, which helps to improve the polyimide layer. And the adhesion between the polyimide layer and the metal layer deposited on it. The high temperature and chemical stability of polyimide play a role in isolating the metal layer from various external environments.

3. Orientation agent for liquid crystal display: Polyimide occupies a very important position in the orientation agent material of TN-LCD, SHN-LCD, TFT-CD and future ferroelectric liquid crystal displays.

4. Electro-optical materials: used as passive or active waveguide materials, optical switch materials, etc., fluorine-containing polyimide is transparent in the communication wavelength range, and polyimide as the matrix of the chromophore can improve the material The stability.

5. Humidity-sensitive materials: the principle of linear expansion by moisture absorption can be used to make humidity sensors.