Maintenance plan of relau vakum leaking position

1. Vacuum furnace vacuum system spool valve pump repair plan: check the wear of the internal parts of the spool valve pump, whether the shaft head sealing ring of the spool valve pump leaks oil, the sealing condition of the exhaust valve plate of the exhaust device, and the vacuum oil circuit Sealing condition, whether the vacuum pump oil is contaminated and test the ultimate vacuum of the slide valve pump.

2. Roots pump maintenance plan for vacuum furnace vacuum system: check the gap between the rotor and the rotor of the Roots pump, and between the rotor and the inner wall of the pump cavity, check the wear of gears and bearings, and the condition of the shaft seal ring of the Roots pump. Check whether the lubricating oil at both ends of the Roots pump is contaminated and test the ultimate vacuum of the Roots pump.

3. Maintenance plan of diffusion pump in the vacuum system of vacuum furnace: check whether the positions and gaps of the nozzles at all levels of the pump core are correct, whether the heating power of the pump and the cooling effect of the pump itself are normal, whether the diffusion pump oil is oxidized, and whether the oil volume of the diffusion pump fulfil requirements. Leak detection for the diffusion pump and its connected pipes and valves, vacuum measuring points, cold traps and other seals. Test the ultimate vacuum of the diffusion pump. Check the temperature and flow of the inlet and outlet water of the vacuum furnace diffusion pump. In many units, the cooling effect of the diffusion pump is not good due to the scale in the cooling water, which causes the vacuum degree to fail to meet the technical index requirements. Water chillers can also be added.

4. Maintenance plan for the external air leakage part of the furnace body: the furnace door seal, the main valve stem seal, the pneumatic ball valve stem seal, the vent valve spool seal, the explosion-proof valve spool seal, the pre-extraction valve stem seal, and the thermocouple Sealing and heating electrode sealing and other places are sealed for leak detection.

5. Venting maintenance plan for the inside of the vacuum furnace body: Properly heat the inside of the vacuum furnace body to release the adsorbed gas inside the furnace body and be pumped away. While vacuuming, argon and nitrogen are filled into the furnace body, so that part of the volatile matter and adsorbed gas are drawn away along with the argon and nitrogen. Then scrub the inner wall of the furnace body with alcohol to remove the adsorbed matter and reduce the amount of outgassing. Vacuum the furnace chamber for a long time to reduce the venting of the furnace chamber surface to the lower limit.