Okwu Mmalite nke Vacuum System nke Agụụ Sintering Ọkụ

Sistemụ oghere na-enwekarị ngwakọta dị iche iche. Nhọrọ a dabere na oghere achọrọ n’oge ọrụ. Sistemụ agụụ na-agụkarị bụ ndị a:

(1) Sistemụ oghere dị ala: nke nwere mgbapụta igwe (rotary vane pump ma ọ bụ mgbapụta valve slide), oghere kachasị nwere ike iru ihe dịka 10 Pa;

(2) Ọkara oghere usoro: Ọ na-onwem na Nchikota nke mgbọrọgwụ mgbapụta na n’ibu mgbapụta (rotary vane mgbapụta ma ọ bụ slide valve mgbapụta), na kacha agụụ nwere ike iru 2 × 10-1 Pa;

(3) Usoro oghere dị elu: A na-ahazikarị ya dị ka mgbapụta mgbasa + Mgbọrọgwụ mgbapụta + igwe mgbapụta (rotary vane pump ma ọ bụ valvụ valvụ slide), ihe kachasị mma nwere ike iru 2 × 10-3 Pa;

(4) Ultra-high vacuum system: turbomolecular pump + Roots pump + mechanical pump (rotary vane pump ma ọ bụ valvụ valvụ slide), ogo kachasị elu nwere ike iru 2 × 10-4 Pa.