Introduction of Vacuum System of Vakuum sintringsugn

Vacuum systems generally have a variety of combinations. The selection is based on the vacuum required during work. Common vacuum systems are as follows:

(1) Low vacuum system: equipped with mechanical pump (rotary vane pump or slide valve pump), the ultimate vacuum can reach about 10 Pa;

(2) Medium vacuum system: It is equipped with a combination of Roots pump and mechanical pump (rotary vane pump or slide valve pump), and the ultimate vacuum can reach 2×10-1 Pa;

(3) High vacuum system: Generally configured as diffusion pump + Roots pump + mechanical pump (rotary vane pump or slide valve pump), the ultimate vacuum can reach 2×10-3 Pa;

(4) Ultra-high vacuum system: turbomolecular pump + Roots pump + mechanical pump (rotary vane pump or slide valve pump), the ultimate vacuum degree can reach 2×10-4 Pa.